Use of the mixture gas


(8) mixture for electronic industry:

Mixture for the electronics industry refers to a special type of electronic mixture used in large scale integrated circuits (LSI), very large scale integrated circuits (VLSI) and semiconductor device manufacturing for gas phase epitaxial growth, chemical vapor deposition, doping, etching and ion implantation processes. There are mainly epitaxial (growth) mixtures, chemical vapor deposition mixtures, mixed mixtures, etching mixtures and other electronic mixtures.