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Excimer laser gas for Coherent TUIMIX ArF

Product nameExcimer laser gas for Coherent TUIMIX ArF

MF:Arf

Purity:>99.995

Dot Class:2.2

Other Names:Premixed Arf laser Gas

CAS NO:/

Grade Standard: Electron Grade, Industrial Grade, Medicine Grade

MSDS


Product Name: Premix Laser Gases


Other names: Argon fluoride laser gas (193nm)


Model:TUI-CTMN-ARF V 2.0


Product types: ArF,F2/Ar/He/Ne 


UN NO. : UN1956


Cylinder volume: 16L, 20L


Valve type: CGA679, DIN 8, DIN 14


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