Excimer laser pulse as the most effective and most reliable ultraviolet laser technology, effectively promote the excimer laser such as semiconductor, AMOLED display, thin films, the silicon base plate processing, organic metal deposition, high temperature superconductivity, etching, materials research, automobile manufacturing, biological, medical, optical fiber, diamond marking equipment and alternative energy, and other growth industry in technological innovation.Common excimer laser gases are wavelength dependent:Available wavelength   193 nm   ArF   248 nm   KrF   308 nm   XeCl   450nm~520nm   XeF