What is Excimer Laser gas
One of the important characteristics of gas laser, laser material is pure gas mixture or a single work.
Due to laser components in the mixture gas purity directly affects the performance of the laser, especially the gas in the presence of oxygen, water, hydrocarbon and other impurities will lead to the laser output power on the mirror (surface) and the electrode wear, still can cause instability of laser emission. Therefore, have a special requirement for the purity of laser mixture components, packaging mixture of the cylinder, also must be dry before filling processing, to prevent pollution of the mixture. If the helium (He) neon (Ne) as the first generation of gas laser, carbon dioxide gas is the second generation of gas laser, will feature extensive use in the field of semiconductor manufacturing krypton fluoride (KrF laser), can be called the third generation of laser.
MEL 80 Excimer Laser
Measuring range:0.4 1.2 (MPa)
Applicable medium:An inert gas
Rated outlet pressure:0.5 (MPa)
Rated flow:200 (m3 / h)
Use:Mixer pressure reducer
Structure:Single stage type
The working principle of:Is acting
The environment temperature:- 30 ℃)