Another application of silane is amorphous semiconductor amorphous silicon. Compared with monocrystalline semiconductor materials, amorphous silicon is characterized by its easy formation of extremely thin (about 10nm thickness) large-area devices. The substrate can be glass, stainless steel, or even plastic, and the surface can be flat or curved. Therefore, various devices with excellent performance can be made.

      Silane has become the most important special gas used in semiconductor microelectronics process. It is used in the preparation of various microelectronic films, including monocrystalline film, microcrystalline, polycrystalline, silicon oxide, silicon nitride, metal silicide, etc. The microelectronic applications of silane are also developing in depth: low temperature epitaxy, selective epitaxy and heteroepitaxy. Not only for silicon devices and silicon integrated circuits, but also for compound semiconductor devices (gallium arsenide, silicon carbide, etc.). It is also used in the preparation of superlattice quantum well materials. Silane is used in almost all advanced integrated circuit production lines in modern times. The purity of silane is greatly related to the performance and yield of the device, and more advanced devices need higher purity silane (including ethanoland propylsilane).

      Silane has been used as silicon - containing thin films and coatings from the traditional microelectronics industry to steel, machinery, chemical and optical fields. Containing silicon coating can make the high temperature oxidation resistance of ordinary steel capacity up to more than 100000 times, also can make the high temperature of other metal chemical stability is greatly improved, the corrosion resistance of internal combustion engine blade significantly enhanced, make various greatly improve the bonding strength between materials and parts, extend the service life of automobile engine parts, can also change the reflection and transmission properties of the glass, resulting in significant energy saving and decorative effect. In the production process of float glass, silane is used to coat the glass surface with a reflective layer, which has a strong adhesion and is fadeless under long-term sunlight, and the light transmittance is only 1/3 of that of ordinary glass. Large area polycrystalline silicon (BSNSC) coated with silicon nitride has achieved a high efficiency of 15.7%. The application of silane vapor deposition technology to manufacture various silicon-containing thin films is increasing in high technology.

       Another potential application of silane is the manufacture of high-performance ceramic engine parts, especially the manufacture of silicide (Si3N4, SiC, etc.) micropowders. The United States, Japan and other countries are spending hundreds of millions of dollars to develop silicon, silicon nitride and silicon carbide micro powder to make high-temperature resistant, high-strength, high-chemical stability ceramics. The powder prepared by silane gas reaction method has the highest purity, fine and even particle size, which can greatly improve the performance of ceramic parts. Its application field is very wide, for example, the valve of automobile engine and turbocharger rotor has been practical, high-speed bearing and high-performance tool has been commercialized, used in internal combustion engine can make the working temperature up to 1400℃, greatly improve the engine efficiency, suitable for a variety of fuels, extend the service life; In addition, it can also be used as the thermal insulation tile and stealth protective layer of the rocket.