With the rapid development of semiconductor industry, the demand for electronic special gas also increases. Due to the high requirement of precision in the production process, the purity of electron gas is also very high. Today, Newred series shares some of the purity requirements for electronic gas.

The production process of electronic special gas involves synthesis, purification, mixture preparation, filling, analysis and detection, gas cylinder treatment and other technologies. The downstream customers have higher requirements on product quality. In particular, the application fields with high degree of precision, such as the extremely 

large scale integrated circuit and the new display panel, have strict requirements on the purification, impurity detection, storage and transportation technology of special gases.

High purity gas purity: special gas requires super purity and super purity. Every N increase in purity and every order of magnitude reduction in particle and metal impurity concentration will bring significant improvement in process complexity and difficulty. For example, the 12-inch, 90-nm IC manufacturing technology requires the purity of the electron gas to be 5N to 6N and the concentration of harmful gaseous impurities to be controlled at PPB (10-9). In the more advanced 28nm and the current international 6nm-10nm integrated circuit manufacturing process, the purity of electronic gas is higher, and the impurity concentration even reaches PPT (10-12) level.

Precision of electronic mixture ratio: With the increase of product components in the mixture and the increase of preparation precision, gas suppliers are often required to carry out fine operation on gas components with multiple PPM (10-6) and even PPB (10-9) concentration, and the difficulty and complexity of the preparation process also increase significantly.

Gas storage and transportation: Ensure that the gas will not be contaminated by secondary pollution in the process of storage, transportation and use. The treatment of the inner and inner surface of the gas cylinder involves a number of processes, which all depend on long-term industry exploration and research and development. In addition, for some gases with high toxicity or danger, negative pressure cylinders should be used for storage and transportation to reduce the risk of dangerous gas leakage.

Gas analysis and detection: As the impurity content to be detected is low to PPB level, unconventional analytical methods such as special gas chromatography, ICP-AES and ICP-MS are required.