Application of trifluoromethane
Trifluoromethane(CHF3), a colorless, slightly odorless, non-conductive gas, is an ideal substitute for halides.
R22 (CHClF2) was prepared by catalytic disproportionation. After rectifying and removing the impurity, 99.99% high purity CHF3 was obtained.
1. Used as solvent and cryogenic refrigerant in supercritical fluid extraction. And as a fire extinguishing agent and raw materials for the manufacture of tetrafluoroethylene, electronic industry plasma chemical etching agents and fluorinated compounds raw materials.
2. Electron grade fluorine form is one of the plasma etching gases widely used in microelectronics industry, especially for etching silicon dioxide film, which has the advantages of fast etching speed and good selectivity. In addition, fluoroform is also used in cryogenic mixing refrigerant, organic synthesis intermediate, infrared detector direct coolant and so on.
3. Used as cryogenic refrigerant, fire extinguishing agent and raw material for the manufacture of tetrafluoroethylene.
4. Used as raw materials for cryogenic refrigerant (-100℃), plasma chemical etching agent for electronic industry and fluoroorganic compounds.
Where to buy trifluoromethane?
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