Latest use and market of krypton gas
Krypton gas has the properties of high density, small thermal conductivity and high transmittance. It is widely used in electronic industry and electric light source industry.
Krypton has a greater relative molecular mass and a smaller thermal conductivity than argon, making it an excellent filling gas. Krypton gas filled with such as: incandescent lamp, fluorescent lamp, flashing arc lamp, iodine lamp. Krypton lamp can save 20%~25% electricity and last 2~3 times longer than fluorine lamp of the same power. The long life krypton lamp is small in size and suitable for mine operation. Continuous ultraviolet light used in the lab can also be filled with krypton gas. Krypton can also be made into atomic lamps that do not require electricity, and used in workplaces where there is no power supply. Krypton lamp transmission capacity is particularly strong, can be used in night combat in the off-road vehicle as a lamp. In the airport runway, usually use krypton gas filled flash arc light for lighting, because it is strong through fog.
The new use of krypton gas is used in the electronics industry. Excelm-based laser etching (Kr+F) : since 1997, it has been used in 0.25 living meters integrated circuit silicon wafer production line (128M, 256M,1G,4G wafer production). The development of the new use has also changed the problem of Kr surplus and Xe shortage in actual production. In the application of excimer laser, the concentration of F in (Kr+F) mixture is controlled at 2.5%~10% (generally 5%) for safety reasons. There is also a ternary mixture of (Kr+Ne+F).
At present, krypton gas has been used in kai xia (Toshiba of Japan), SK hynix scale application, the market is rumored to have samsung import plan. Domestic Yangtze storage, dalian Intel has been small - scale use. The application of krypton gas in 3D NAND is mainly the etching and cleaning of deep trenches. 3D NAND has a large groove depth ratio, so it is very important to etch the groove pattern as required. The industry's consumption of krypton gas is expected to reach 4,000m3 / month in 2020 (without considering the impact of the epidemic), according to the source's prediction at the end of 2019. With the rapid iteration of 5G, Internet of things technology and various electronic products, big data is showing explosive growth, and the demand for 3DNAND chips is also growing rapidly. As a result, the consumption of krypton gas also increases, highlighting the increasing imbalance between the supply and demand of krypton gas.